438./538. Microelectronic Processing (3)
- Prerequisite: E E 210 or PHYS 152.
- Basic principles of device physics and applications of transport processes to device fabrication. Fabrication processes include oxidation, microlithography, etching, doping by diffusion or ion implantation, film growth by chemical vapor deposition, and metallization.
- Graduate students have additional assignments on design of micro-fabricated devices. (Lecture-problems 3 hours) Letter grade only (A-F).
View the current course offerings:
Chemical Engineering (Ch E)
Official Program Information
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