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California State University, Long Beach

Chemical Engineering (ChE)

538./438. Microelectronic Processing (3)

  • Prerequisite: E E 210 or PHYS 152.
  • Basic principles of device physics and applications of transport processes to device fabrication. Fabrication processes include oxidation, microlithography, etching, doping by diffusion or ion implantation, film growth by chemical vapor deposition, and metallization.
  • Graduate students have additional assignments on design of micro-fabricated devices. (Lecture-problems 3 hours) Letter grade only (A-F).
Course Outline
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Chemical Engineering (Ch E)

Engineering Technology


Official Program Information


*Note: although every effort is made to keep this Web site up to date, you should also consult the printed catalog for official information and program requirements, which may vary depending on the year you enter(ed) the program.

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